JPH01125548U - - Google Patents
Info
- Publication number
- JPH01125548U JPH01125548U JP2139988U JP2139988U JPH01125548U JP H01125548 U JPH01125548 U JP H01125548U JP 2139988 U JP2139988 U JP 2139988U JP 2139988 U JP2139988 U JP 2139988U JP H01125548 U JPH01125548 U JP H01125548U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- arm
- block
- swinging
- substrate storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims 5
- 230000007797 corrosion Effects 0.000 claims 3
- 238000005260 corrosion Methods 0.000 claims 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139988U JPH062268Y2 (ja) | 1988-02-19 | 1988-02-19 | カセット搬送装置のカセット検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2139988U JPH062268Y2 (ja) | 1988-02-19 | 1988-02-19 | カセット搬送装置のカセット検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01125548U true JPH01125548U (en]) | 1989-08-28 |
| JPH062268Y2 JPH062268Y2 (ja) | 1994-01-19 |
Family
ID=31238606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2139988U Expired - Lifetime JPH062268Y2 (ja) | 1988-02-19 | 1988-02-19 | カセット搬送装置のカセット検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062268Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579941U (ja) * | 1992-03-31 | 1993-10-29 | 株式会社スガイ | 物品把持装置 |
| WO2011141960A1 (ja) * | 2010-05-12 | 2011-11-17 | ムラテックオートメーション株式会社 | 自動倉庫及び移載方法 |
-
1988
- 1988-02-19 JP JP2139988U patent/JPH062268Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0579941U (ja) * | 1992-03-31 | 1993-10-29 | 株式会社スガイ | 物品把持装置 |
| WO2011141960A1 (ja) * | 2010-05-12 | 2011-11-17 | ムラテックオートメーション株式会社 | 自動倉庫及び移載方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062268Y2 (ja) | 1994-01-19 |